Application

Wafer transfer machine

Semiconductor manufacturing equipment has a complex transport system. In the wafer surface treatment process, robot arms are used to remove wafers from the process unit and store them. In the wafer transfer process, there is no room for any collisions or drop-offs. Therefore, the robot arm and the process unit must be positioned strictly with respect to each other.

Therefore, it is important to control the position of the robot arm and the horizontal level of the arm that moves the wafer in and out of the process unit.

If wafers are not leveled, they will collide with each other and the process will not be able to process.

Our digital level is about the weight of a wafer, so it can be placed on the end of a robotic arm, where existing levels cannot be placed.